SAM-CYGNUS Scanning Acoustic Microscope for LED, Wafer Kind :   SAM Products

Wafer Transfer Fobot is installed as this is the instrument for testing Wafer Wafer Map, BCR reader, Wafer Pre Aligner, Spin Coater System are installed  Detect the flaws of Wafer and easy before and after processing  Hight performance, high speed and accurate scanning system  Water jet scanning system  Flaw detection by auto scan of the probe installed 3 axis scanner  Signal lamp and safety sensor A, C, T Scan 1. Ultrasonic Pulser/Receiver Frequency Range : 1 - 500MHz Low noise, high performance pulser/receiver derives the ultrasonic signal of ultra wide-bandwidth characteristics from the transducer. 2. A/D Converter Real time 2GHz Sampling Rate 3. Wafer Transfer Robot   4"~6" Wafer R-Axis 470mm Z-Axis 200mm Stroke Repeatability 0.05mm 1Kg Load Capacity 4. General Scanning Area 4" x 6" Repeatability +/-0.002 mm Main Unit SIZE 1800mm X 1100mm X 1400mm Weight Approx. 750kg Power AC220V / 30A (1Phase)